设备翻新
- AMAT Centura RTP/RTO/DPN/xGen
- AMAT Centura EPI/SiCoNi
- AMAT Vantage RTP (Soak / Spike)
- TEL Indyplus Pyro/HTO/THINOX/DPOLY/ALD/Anneal
- TEL Formula DCS/TEOS/UPOLY/BTBAS/HCD
- AMAT Endura II Ti/Ta/AL/PCXT/DMD/MOCVD
- TEL Lithius / ACT12/ACT8/MARK8
- Hitachi CG4000/4100/S93XX
- KLA SP1/SP2
- KLA Quantox XP