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备件与耗材

No OEM P/N Part Description Equipment
1 0040-88855 300mm AMAT Centura Lamp Housing Centura Radiance RTP
2 0040-70247 300mm AMAT Vantage Lamp Housing Vantage Radiance RTP
3 0190-38516 300mm AMAT Centura Lamp Centura Radiance RTP
4 0010-04675 300mm AMAT Centura Lamp Reflector Centura Radiance RTP
5 0010-23716 300mm AMAT Centura RTP Pyro Meter Centura Radiance RTP
6 0200-04094 300mm AMAT Centura Support Cylinder Centura Radiance RTP
7 0240-53327 300mm AMAT Centura Cooling Hub Centura Radiance RTP
8 0200-02917 300mm AMAT Centura RTP Edge Ring Centura Radiance RTP
9 0190-42680 300mm AMAT EPI Lamp BNA8 Centura EPI
10 0190-39351 300mm AMAT EPI Lamp E9 Centura EPI
11 0200-01947 300mm AMAT EPI SiC SUS, P-EPI Centura EPI
12 0200-11083 300mm AMAT EPI SiC SUS, N-EPI Centura EPI
13 0200-03259 300mm AMAT EPI Ring, Pre-Heat, P-EPI Centura EPI
14 0200-09651 300mm AMAT EPI Ring, Pre-Heat, N-EPI Centura EPI
15 0200-35256 300mm AMAT EPI Ring, Pre-Heat Centura EPI
16 0200-35081 300mm AMAT EPI Ring, Pre-Heat Centura EPI
17 0200-89032 TIP, SHAFT, SUSCEPTOR, SUPPORT Centura EPI
18 0200-00188 PIN, GRAPHITE, WAFER LIFT, 9.0 BC Centura EPI
19 0041-50864 01 Grounding Ring 300mm SiCoNi
20 0022-01403 01 Mixing Ring 300mm SiCoNi
21 0021-60551 Rev02 Mesh Diffuser 300mm SiCoNi
22 0021-34728 Rev03 Block Plate 300mm SiCoNi
23 0021-97599 Rev02 Pumping Liner 300mm SiCoNi
24 0041-48366 Rev03 Pumping Channel 300mm SiCoNi
25 0021-96476 Edge Ring 300mm SiCoNi
26 0041-46867 Rev02 RF Electrode 300mm SiCoNi
27 0021-96104 Rev01 Single Hole Diffuser 300mm SiCoNi
28 0041-28493 Rev03 Top Plate 300mm SiCoNi
29 0051-24578 Top AL Gasline 300mm SiCoNi
30 0051-24579 BTM AL Gasline 300mm SiCoNi
31 3805-220014-12 Formula TP heater TEL Formula
32 3810-334619-11 Formula Upper Hub TEL Formula
33 VMU-54-001 Indyplus High Temp Heater TEL Indyplus
34 VMM-56-002 Indyplus Mid Temp Heater TEL Indyplus
35 VCM-50-012L Formula Mid Temp Heater TEL Formula
No LAM P/N EQUIPMENT NEW REPAIR
1 839-800327-315 2300 Exelan V V
2 839-800327-385 2300 Flex V V
3 839-800327-390
839-800327-391		 2300 Flex 45 V V
4 839-800327-508
839-800327-509		 2300 Flex Ex V V
5 839-800327-518
839-800327-519		 2300 Flex Fx V V
6 839-800327-523
839-800327-525
839-800327-526
839-800327-562		 2300 Flex Gx V V
7 839-019090-577 2300 Flex ES/EL
2300 Flex FS/FL		 V V
8 839-019090-324 2300 Versys Star V V
9 839-019090-328 2300 Versys Kiyo V V
10 839-019090-374 2300 Kiyo 45 V V
11 839-800328-300 2300 Syndion C/FS V V
12 839-019090-608
839-019090-611
839-019090-620		 2300 Kiyo CX
2300 Kiyo EX
2300 Kiyo FX		 V V
No LAM P/N EQUIPMENT
1 857‐065064‐004 ABE
2 713‐066269‐002 ABE
3 713‐069935‐003 FLEX 45/DD/DS/DX
4 713‐072792‐003 FLEX 45/DD/DS/DX
5 857‐027108‐001 FLEX 45/DD/DS/DX
6 857‐050466‐008 ABE
7 857‐072806‐005 FLEX 45/DD/DS/DX
8 857‐073299‐001 FLEX ES/EL/EX/EX+
9 713‐064028‐006 FLEX45
10 713‐072728‐130 FLEX ES/EL/EX/EX+
11 857‐085550‐011 FLEX ES/EL/EX/EX+
12 857‐073299‐002 FLEX ES/EL/EX/EX+
13 713‐083687‐001 FLEX ES/EL/EX/EX+
14 713‐080721‐001 FLEX 45/DD/DS/DX
15 713‐088966‐001 FLEX 45/DD/DS/DX
16 857‐073710‐002 FLEX 45/DD/DS/DX
17 715‐075954‐003 FLEX45
18 839‐086924‐020 FLEX45
19 839‐086924‐021 FLEX45
20 839‐070842‐004 FLEX45
21 713‐027299‐002 FLEX45
22 713‐037069‐003 FLEX45
23 713‐034965‐001 FLEX45
24 839‐039317‐003 FLEX45
25 713‐034964‐001 FLEX45
26 857‐027108‐100 FLEX ES/EL/EX/EX+
27 719‐078253‐017 FLEX FS/FX/FXP
28 714‐072728‐603 FLEX FS/FX/FXP
29 716‐073668‐103 FLEX ES/EL/EX/EX+
30 716‐073669‐104 FLEX ES/EL/EX/EX+
31 857‐086768‐195 FLEX ES/EL/EX/EX+
32 857‐265712‐003 FLEX45
33 857‐120208‐010 FLEX FS/FX/FXP
34 857‐120209‐009 FLEX FS/FX/FXP
35 857‐120210‐008 FLEX FS/FX/FXP
Item Manufacturer MKS P/N AMAT P/N
1 AMAT 0190-08113
2 MKS FI20166 0190-49840
3 AMAT 0190-00363
4 MKS FI20164-1 0190-51029
5 MKS AX3151-1 3750-01146
6 AMAT 0190-04514
7 MKS AX3153-1 3750-01145
8 AMAT 0010-60886
9 MKS AX2530RHCE-AMAT 0190-49838
10 AMAT 0190-00362
11 MKS AX2530PSCE-AMAT 0190-49837
Parts available for sale
ITEM Manufacturer Part Number
1 SMC Heat Exchanger INR-498-003B
2 Quality Transformer and Electronics 8785